Calibre Mask Data Preparation User's Manual

Mentor's Mask Data Preparation (MDP) solution is fully compatible with the Calibre platform, enabling you to complete all resolution enhancement processing and mask data format conversion tasks in one mask fabrication batch run using a single control language.

Calibre MDP provides

  • This document is for information and instruction purposes. Mentor Graphics reserves the right to make changes in specifications and other information contained in this publication without prior notice, and the.
  • Technology leading mask data preparation. CATS® is a highly scalable and flexible software application that transcribes complex design data into machine readable instructions for e-beam and laser machines used for the pattern generation and manufacturing of IC.
  • Layer derivation
  • Mirroring
  • Scaling
  • Rotation
  • Planarization fill

Data Preparation Can Enhance Excel. 10 WAYS DATA PREPARATION CAN HELP EXCEL 6. Mask Sensitive Data Monarch has the ability to mask data so you make sure you comply with corporate or regulatory standards. N Users can collaborate within the file by seeing.

Calibre user manual pdf
  • Global and selective sizing
  • Hierarchical mask rule checking (MRC)
  • Mask proximity correction (MPC)
  • Mask fracturing into many standard output formats

Calibre MDP provides direct output for the leading mask writer formats in the sub-wavelength era, such as MEBES, JEOL, Micronic, and Variable-Shaped-Beam, in addition to standard GDSII.

Products

Manual

Calibre FRACTURE

Calibre FRACTURE exports mask making data directly in the target mask writing format without changing tools or creating large intermediate files. Versions of Calibre FRACTURE are available for Micronic, JEOL, MEBES, Toshiba, and Hitachi formats. Learn More

Calibre MDPmerge

Calibre MDPmerge enables a continuous flow from physical verification and resolution enhancement techniques (RET) through the completion of mask data preparation. Learn More

Calibre MDPverify

Calibre MDPverify checks final mask writer data against the original GDSII definition to prevent mask writing with erroneous data. It supports the tracking of design updates by confirming the presence of desired changes in the final mask data independently of the fracture step. Learn More

Calibre User Manual Pdf

Calibre MDPview

Calibre MDPview enables quick and easy review of design data in GDSII and OASIS format, as well as in all popular mask writer pattern formats and data assemblies through the respective job decks. Learn More

Calibre Manual Pdf

Calibre MAPI

Calibre MAPI extends the tcl programming language set available in Calibre MDPview™ with dedicated functions supporting the extraction and validation of suitable locations for mask metrology. Learn More

Calibre MASKOPT

Calibre MASKOPT reduces mask cost and mask writing time by lowering the total shot count through advanced pre-processing of the fractured data. Calibre MASKOPT can achieve up to 20% shot count reduction on data sets for advanced technology nodes at 45 nm and below. Learn More

Link Calibre S User Manual

Calibre Training

Calibre User Manual Download

We have training courses available for Calibre products in our training centers around the world, online, or at your site. Calibre training courses

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